Usage |
For photo resist stripping of optical disk stamper |
| Features |
- Complete removal of photo resist which is unable to remove fully by chemical washing.
- Improvement of quality and productivity of optical disks through increase of stripping performance
|
| Process |
High frequency plasma treatment |
| Dimensions of the system (mm) |
| Main unit |
550 (Width) X 1,050 (Depth) X 920 (Height) |
| Pumping System |
490 (Width) X 730 (Depth) X 740 (Height) |
|
|
Weight (kg)
|
| Main unit |
150 |
| Pumping system |
130 |
|