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♦Vapor deposition system |
| AAMF-C series | |
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♦Sputtering equipment |
| Load-lock sputtering system Multi-chamber sputtering system |
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♦Etching & ashing equipment |
| Plasma etching system, EXAM Downflow & 2-step ashing system |
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♦Surface reforming system |
| DLC thin film depositing
system Ion plating system : AIH-16110·AIF-850SBT |