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| ♦Oil-sealed rotary vacuum pump | |||
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[Construction]
Oil-sealed rotary pumps are widely used as an economical pump to compress gases whose pressure ranges from atmospheric pressure up to 0.13 to 1.3 ×10-2Pa and then exhaust them into the air. SR and SRP pumps (rotary plunger type) consist of a cylinder, rotors, piston, slide pins and exhaust valves while SVC and SGR pumps (sliding vane rotary vacuum pump) consist of rotors, vanes, vane springs and exhaust valves.
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[Principle of operation]
When the rotors, which are fixed to shafts, are rotated, a space emerges inside the pump cylinder and its volume gradually increases. As a result, outside gas is introduced into the space in the cylinder through the suction port.
As the rotors are further rotated, the gas in the spaces between the cylinder and the piston, and between the cylinder and the vanes, is moved to another space, where the gas is compressed and then exhausted through the exhaust valve into the oil tank.