Oil diffusion pumps
- NEOVAC SX (SH-704) or LION A is used for the operating oil.
- With DC-705 operating oil, ultimate pressure is 4×10-6 Pa, and power is increased by 20% to 45%.
- Oil vapor reverse flow rate is 7×10-7 to 2×10-8 g/min・cm2 or less.
- High exhaust rate
- Oil vapor reverse flow is small.
- Long operating-life of heater (Cast aluminum heater is used.)
- High allowable backpressure (Side ejector type)