Products

High-density plasma unit, SWP

The SWP series use surface wave plasma (SWP) to coat large areas in a uniform layer of high-density plasma.
The unit has been proven in many applications (ashing, surface processing, etc.).
The equipment can also undergo H2 radical cleaning without suffering damage.

Now accepting sample demonstration requests.

High-density plasma unit, SWP High-density plasma unit, SWP

[Feature]

The SWP series use surface wave plasma (SWP) to coat large areas in a uniform layer of high-density plasma. The unit has been adopted for ashing and CVD.
It enables damage-free ashing at high rate.

Surface wave plasma

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SWP application fields

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SWP chamber configuration and system outline by purpose

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SWP series plasma discharge status and ashing data

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