Plasma etching unit, EXAM
EXAM is multi-purpose plasma etching unit that can be used in many ways. It is based on our know-how of semiconductor mass-production equipment.
It enables multiple processes such as etching and ashing in the same chamber by switching the gas system and plasma mode.
Now accepting sample demonstration requests.
- Batch type plasma etching unit with 250 × 250 mm processing stage.
- This unit can etch quartz as well as silicone, oxide film, and nitride film.