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Magnetic field excitation type ion plating system

Using a newly developed plasma source, this system produces smoother film surfaces than conventional methods do.
It can also form film types (c-BN) that the conventional methods cannot.

Magnetic field excitation type ion plating system Magnetic field excitation type ion plating system

Internal mechanism

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Comparison of surface roughness by plasma source difference (AFM Observation)

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Applications

  • Coating of precision machining tool surfaces (Durability improvement)
  • Coating of precision mold surfaces (Mold release property and surface durability improvement)
  • Other surface coating processes for mechanical sliding parts that require friction reduction
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