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Arc discharge type high-vacuum ion plating system

Using an internally developed method, this system ionizes volatile particles under high vacuum.
The smooth fine film quality has been proven in many applications over many years.

  • Arc discharge type high-vacuum ion plating systemArc discharge type high-vacuum ion plating system
  • Arc discharge type magnetron sputtering systemArc discharge type magnetron sputtering system

Ionizing method diagram

Volatile particle ionization status

03-4

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