Thin film forming equipment Multi-chamber sputtering system Load-lock type sputtering system Batch type sputtering system Inline sputtering system Roll to roll sputtering system Ultra-high vacuum sputtering system Sputtering system for R & D Standard vapor deposition system Vapor deposition system for lift-off process Load-lock type vapor deposition system Horizontal vapor deposition system Vapor deposition unit for research and development Vapor deposition system for large-sized resin substrates Plasma CVD system Plasma polymerization system