Company Profile

Company history

Foundation-1969

Capital / Business sites   Technologies / Products
Began doing business by renting the Karumo Factory of Kawanishi Kikai Seisakusho.
Capital: 200,000 yen.
1949 Manufacturing of combing machines, electric equipment and talkie projectors
  1950 Start of manufacturing of infrared drying furnaces, various conveyors and coating equipment.
  1951 Start of manufacturing of vacuum pumps and vacuum equipment
Capital was increased to 800,000 yen. 1953
Capital was increased to 3,200,000 yen. 1954  
  1956 Start of manufacturing of precision projectors.
  1957 We succeeded in domestically producing a large-sized vacuum mechanical booster pump (Exhaust rate: 22,000 m3/h), SMB-20000, using industrial subsidies from the Ministry of International Trade and Industry.
Capital was increased to 9,600,000 yen. 1958 Start of manufacturing of semiconductor-related equipment
Delivery of vacuum degassing ingot casting equipment
Completion of reduction furnace, refining furnace, monocrystalline furnace and alloy furnace for Ge
Tokyo Office was newly established in Ginza. 1959  
Capital was increased to 20,000,000 yen. 1960 Production of wool combing machines (Comber) exceeded 1000 units.
Completion of monocrystalline furnace for Si
Capital was increased to 50,000,000 yen. 1962 We succeeded in commercializing high-vacuum deposition equipment of a high vacuum rate.
Tokyo Office was raised to Tokyo Branch (relocated to Nihonbashi, Chuo-ku).
Capital was increased to 100,000,000 yen.
1963 Completion of large-sized precision projector, SG30
  1965 Development and commercialization of ultra-high-vacuum multi-layer film deposition equipment using electron beams, ion bombardment equipment and automatic solder bath equipment
Tokyo Factory was newly established in Ota-ku, Tokyo. 1966 Launch of multi-stage diffusion furnace
  1967 Production of combing machines (Comber) exceeded 2000 units.
Completion of IC firing furnace. Completion of vacuum sintering furnace.
Shiga Moriyama Factory was newly established Moriyama, Shiga. 1968  
  1969 Completion of new coating system and powder coating equipment

1970-1990

Capital / Business sites   Technologies / Products
Completion of the second phase of construction work at the Moriyama Factory in Shiga 1970 Commercialization of electronic automatic card punching equipment, ACP-900-3S, through joint development with HAYASHIMON KOSHO
Capital was increased to 200,000,000 yen. 1971 Completion of large-sized precision projector, HG-40, with the largest screen size among domestic projectors
Completion of multi-purpose small-sized conveyor furnace
  1972 Production of bowling projectors exceeded 10,000 units.
  1973 Completion of standardization of deposition equipment for quartz oscillators
Sales Dept. was transferred to Goko-Dori (Goko Bldg.) in Chuo-ku, Kobe. 1975 Completion of vacuum press-fitting machine for quartz oscillators
Launch of oil rotary vacuum pump, SRP-15000B
Completion of standardization of solder reflow furnace for thick film IC PCB mounting process
Tokyo Factory was relocated to Tsurumi-ku, Yokohama. 1976 Completion of ion plating equipment for mass-production Establishment of carbide film and corrosion-proof film forming technologies
  1978 Completion of continuous liquid crystal injection equipment that contributes to energy conservation Completion of high-speed sputtering equipment (high-frequency type)
  1979 Completion of continuous electron beam deposition equipment for conductive films
  1982 Completion of low-pressure plasma CVD equipment
Completion of near-infrared firing furnace
Completion of direct-connection type oil rotary pumps, SGD-600/1000, and mechanical booster pump, SMB-300
  1983 Completion of infrared heating type low-pressure CVD equipment
Head Office and Kobe Factory were relocated to the Seishin Industrial Complex. 1984  
Completion of the second phase of construction work at the Kobe Factory 1985  
Kobe Office was relocated to Nishimachi (Mitsui Nissei Kobe Building), Chuo-ku, Kobe. 1986 Completion of direct-connection type oil rotary pump, SGD-1300
  1987 Completion of standardization of double-sided firing furnace for Cu paste
Completion of plasma CVD equipment, ACV-660
  1989  Completion of c-BN thin film forming equipment
Completion of low-noise oil rotary vacuum pump, SR-75BII
The multi-purpose ion plating equipment received the Small/Medium Business Excellent New Technology / Product Award (Kyowa Technical Promotion Center).
Development of ECR plasma CVD equipment
Completion of direct-connection type oil rotary pumps, SGD-400/SGD-900
  1990 Completion of pulse plasma CVD equipment

1991-

Capital / Business sites   Technologies / Products

Capital was increased to 300,000,000 yen.

1991 Development of multi-sputtering equipment (PRODUCE)
Launch of H2O gas supply unit
Completion of erect image precision projector, VS302
  1992 Launch of two-step ashing equipment
  1993 Completion of erect image precision projector, VT302
Completion of low-noise oil rotary vacuum pumps, SR-25BII/-37BII
  1994 Completion of plasma CVD equipment for DLC
  1995 Development of multi-atmosphere soldering equipment
  1996 Completion of sealing exhaust equipment for PDP
Development of new ashing equipment for mass-production
1999 Shiga Moriyama Factory acquired ISO9001 certification.
Launch of vacuum H2 soldering equipment
Launch of plasma cleaning equipment, EXAM
Launch of bearing inspection projector, ST
  2000 Launch of H2 plasma reflow equipment
Head Office, Kobe Factory, Kobe Office and Tokyo Branch acquired ISO9001 certification.
Launch of large-size SWP ashing equipment
Delivery of continuous sealing exhaust equipment for PDP
Tokyo branch / transferred to Muromachi Nihonbashi (Nanwa Nihonbashi Bldg.) 2001 Completion of plasma etching equipment, EXAM
Completion of large-size external heating plasma CVD equipment (Reactor inner diameter: 550 height: 2200)
Completion of compact type mechanical booster series, SMB-C06/C15/C25
  2002 Head Office, Kobe Factory, Kobe Office and Tokyo Branch acquired ISO9001:2000 certification.
Launch of plasma polymerization equipment
Completion of c-BN film forming equipment for mass-production tools
Development of inline plasma polymerization equipment
  2003 Shiga Moriyama Factory acquired ISO9001:2000 certification.
Development of sealing exhaust equipment for FED
Delivery of DLC equipment for mass-production
Completion of high-vacuum etching equipment
Development of deep ICP equipment for MEMS
Delivery of corrosion-proof water-ring vacuum pump (Made of HASTELLOY)
Delivery of polarimeter with image processing capabilities, SF-IIC
Establishment of division system (Equipment Division and Standard Product Division)
Kobe Office was raised to Kobe Branch.
2004 Completion of continuous vacuum/H2 soldering equipment
Completion of data logging system for film forming equipment
Delivery of vacuum soldering equipment achieves 70 units.
Completion of deep-focus projector development model
Completion of dry pump SSH series
  2005 Head Office and Kobe Factory acquired ISO14001:1996 certification.
  2006 Head Office and Kobe Factory acquired ISO14001:2004 certification.
Shiga Moriyama Factory acquired ISO14001: 2004 certification.
  2007 “Vacuum Solder Equipment for Lead-free Soldering and Flux-free and Void-free Bonding” received the Chairman’s Award in the Product/Technical Development Category at the 1st Hyogo Manufacturing Technology Awards (Hyogo Industrial Association).
Also, this equipment received the Award of Excellence in the Product/Technical Development Category at the 2nd Japanese Manufacturing Performance Awards.
  2008 Development of virus inspection equipment
Launch of polarimeter, SF-IIL
  2009 Diamond-like-carbon film coating equipment (PIG type DLC film forming equipment) received the 21st Small/Medium Business Excellent New Technology / Product Award (sponsored by RESONA Medium and Small Business Promotion Foundation and Business & Technology Daily News).
Completion of ICP etching equipment (SERIO)
  2010 Delivery of transparent conductive film mass-production equipment for solar cells
Tokyo Factory was relocated to Kohoku-ku, Yokohama, and renamed the Tokyo Service Center. 2011 Completion of large-size dry vacuum pump, SST450
Completion of image processing unit for polarimeter
Conclusion of capital/business partnership agreement with Hitachi Zosen Corporation
Capital was increased to 375,000,000 yen.
2012  
  2013 Launch of dry pump, SSX300
  2014 Launch of ultra-high vacuum multi sputtering equipment
Launch of multi ICP etching equipment
  2017 Launch of SGH Series, Direct-drive Oil Sealed Rotary Vacuum Pump
Shiga Moriyama Factory acquired ISO9001:2015 certification.
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