The semiconductor market is becoming increasingly active, and the power device market in
particular is expected to continue to grow significantly after 2025, with development and
production being strengthened not only in Japan but also overseas.
At this exhibition, we will exhibit panels and samples of various vacuum equipment such as
plasma equipment and film deposition equipment, with a focus on vacuum reflow equipment,
which has a rich track record in the power device market. We will also introduce our new
product, the “Atmospheric Pressure Plasma System.” By using Ar gas processing and direct
plasma methods, which were difficult with conventional technology, we have achieved surface
treatment similar to RIE processing in a vacuum. We will also exhibit a demo machine, so
please feel free to consult with our dedicated staff about sample demos, etc.

[Exhibition Information]
Date: Wednesday, January 22, 2025 to Friday, January 24, 2025
Location: Tokyo Big Sight
Booth location: East Hall 1, E3-22

 

 

 

(Exhibited products)
① Vacuum reflow equipment
As the standard machine in the power device industry, it has the No. 1 track record in Japan.
It also supports concentration control and safety management of various reductive
atmospheres (Formic acid, H2).

② Vacuum plasma equipment
It supports a variety of gases and can be used for a variety of purposes such as reduction
processing and organic film etching.
We offer stage sizes from 8 inches to a maximum of 600 mm□, and are also compatible with
automated machines.

③ Atmospheric pressure plasma system (New product)
This new product achieves surface treatment similar to conventional vacuum plasma under
atmospheric pressure.
We can introduce a diverse lineup from small experimental machines to systems with
automated machines (e.g. magazine to magazine compatible with lead frames).

We will also introduce various equipment, such as our power device manufacturing process
lineup including film formation, plasma and heat treatment, as well as integrated anti-fouling
and anti-fogging film formation equipment.

All our staff look forward to seeing you.