Plasma etching unit, EXAM

EXAM is multi-purpose plasma etching unit that can be used in many ways. It is based on our know-how of semiconductor mass-production equipment.
It enables multiple processes such as etching and ashing in the same chamber by switching the gas system and plasma mode.

Now accepting sample demonstration requests.

Plasma etching unit, EXAM


  • Batch type plasma etching unit with 250 × 250 mm processing stage.
  • This unit can etch quartz as well as silicone, oxide film, and nitride film.


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