Products

Valve (Vacuum valve)

[High-vacuum valve]

When the disc is opened, conductance is high and leak volume is small, while the pump exhaust rate is hardly reduced.

  • The body is made of SS400 + nickel plating, SUS304, etc.
  • The seal is made of nitrile rubber, fluororubber, etc.
  • The flange is a vacuum flange with VG gasket groove (JIS B2290).
  • Amount of leak (checked with a He leak detector in the non-operating state) is 1.3 × 10-9 Pa cm3/sec or less.

 

SV-S series

  • Manual high-vacuum valve
  • S-shaped valve can be used without bending pipes.

zu_svs

SV-L series

  • Manual high-vacuum valve
  • L-shaped valve (Standard shape of vacuum valve)

zu_svl

SNV-S series

  • Pneumatic high-vacuum valve
  • S-shaped valve can be used without bending pipes.
  • The solenoid valve voltage can be arbitrarily selected.
  • As an optional accessory, an opening/closing operation switch available.
  • Explosion-proof types are also available.

zu_snvs

SNV-L series

  • Pneumatic high-vacuum valve
  • L-shaped valve (Standard shape of vacuum valve)
  • The solenoid valve voltage can be arbitrarily selected.
  • As an optional accessory, an opening/closing operation switch available.
  • Explosion-proof types are also available.

zu_snvl

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