Oil diffusion pumps

[Common specifications]

  • NEOVAC SX (SH-704) or LION A is used for the operating oil.
  • With DC-705 operating oil, ultimate pressure is 4×10-6 Pa, and power is increased by 20% to 45%.
  • Oil vapor reverse flow rate is 7×10-7 to 2×10-8 g/min・cm2 or less.


  • High exhaust rate
  • Oil vapor reverse flow is small.
  • Long operating-life of heater (Cast aluminum heater is used.)
  • High allowable backpressure (Side ejector type)

Specifications and dimensions (Standard type) of Oil diffusion pumps


Specifications and dimensions (Side ejector type) of Oil diffusion pumps


page top