Valve (Vacuum valve)
[High-vacuum valve]
When the disc is opened, conductance is high and leak volume is small, while the pump exhaust rate is hardly reduced.
- The body is made of SS400 + nickel plating, SUS304, etc.
- The seal is made of nitrile rubber, fluororubber, etc.
- The flange is a vacuum flange with VG gasket groove (JIS B2290).
- Amount of leak (checked with a He leak detector in the non-operating state) is 1.3 × 10-9 Pa cm3/sec or less.
SV-L series
- Manual high-vacuum valve
- L-shaped valve (Standard shape of vacuum valve)
SNV-L series
- Pneumatic high-vacuum valve
- L-shaped valve (Standard shape of vacuum valve)
- The solenoid valve voltage can be arbitrarily selected.
- As an optional accessory, an opening/closing operation switch available.
- Explosion-proof types are also available.
